发明授权
US07888705B2 Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same
有权
用于定义具有制造保证光环的动态阵列部分的方法和实现相同的装置的方法
- 专利标题： Methods for defining dynamic array section with manufacturing assurance halo and apparatus implementing the same
- 专利标题（中）： 用于定义具有制造保证光环的动态阵列部分的方法和实现相同的装置的方法
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申请号： US12013366申请日： 2008-01-11
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公开(公告)号： US07888705B2公开(公告)日： 2011-02-15
- 发明人: Scott T. Becker , Michael C. Smayling
- 申请人： Scott T. Becker , Michael C. Smayling
- 申请人地址： US CA Los Gatos
- 专利权人： Tela Innovations, Inc.
- 当前专利权人： Tela Innovations, Inc.
- 当前专利权人地址： US CA Los Gatos
- 代理机构： Martine Penilla & Gencarella, LLP
- 主分类号： H01L21/82
- IPC分类号： H01L21/82 ; G06F9/45
摘要：
A method is disclosed for defining a dynamic array section to be manufactured on a semiconductor chip. The method includes defining a peripheral boundary of the dynamic array section. The method also includes defining a manufacturing assurance halo outside the boundary of the dynamic array section. The method further includes controlling chip layout features within the manufacturing assurance halo to ensure that manufacturing of conductive features inside the boundary of the dynamic array section is not adversely affected by chip layout features within the manufacturing assurance halo.
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