发明授权
- 专利标题: Tune range limiter
- 专利标题(中): 调谐范围限制器
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申请号: US12236716申请日: 2008-09-24
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公开(公告)号: US07863996B2公开(公告)日: 2011-01-04
- 发明人: Daniel H. Cotter , Sean O. Harnett
- 申请人: Daniel H. Cotter , Sean O. Harnett
- 申请人地址: US MA Wilmington
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 主分类号: H03H7/38
- IPC分类号: H03H7/38
摘要:
An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
公开/授权文献
- US20100073104A1 Tune Range Limiter 公开/授权日:2010-03-25
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