Invention Grant
US07852072B2 Test-device system for independent characterization of sensor-width and sensor-stripe-height definition processes
有权
用于传感器宽度和传感器条纹高度定义过程的独立表征的测试设备系统
- Patent Title: Test-device system for independent characterization of sensor-width and sensor-stripe-height definition processes
- Patent Title (中): 用于传感器宽度和传感器条纹高度定义过程的独立表征的测试设备系统
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Application No.: US12006323Application Date: 2007-12-31
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Publication No.: US07852072B2Publication Date: 2010-12-14
- Inventor: Satoru Araki , Robert S. Beach , Ying Hong , David J. Seagle
- Applicant: Satoru Araki , Robert S. Beach , Ying Hong , David J. Seagle
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies, Netherlands, B.V.
- Current Assignee: Hitachi Global Storage Technologies, Netherlands, B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G01R33/12
- IPC: G01R33/12
Abstract:
A test-device system and method for deconvoluting measurements of effects of a sensor-width definition process from measurements of effects of a sensor-stripe-height-definition process in a manufacture of a magnetic sensor. The test-device system comprises a first test device for generating data to characterize a sensor-width-definition process. The test-device system also comprises a second test device for generating data to characterize a sensor-stripe-height-definition process. The test-device system allows independent characterization of a sensor-width parameter and a sensor-stripe-height parameter.
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