发明授权
- 专利标题： Actuation microsystem and method of producing same
- 专利标题（中）： 激光微系统及其制作方法
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申请号： US12010628申请日： 2008-01-28
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公开(公告)号： US07834723B2公开(公告)日： 2010-11-16
- 发明人: Henry Sibuet , Christel Dieppedale
- 申请人： Henry Sibuet , Christel Dieppedale
- 申请人地址： FR Paris
- 专利权人： Commissariat a l'Energie Atomique
- 当前专利权人： Commissariat a l'Energie Atomique
- 当前专利权人地址： FR Paris
- 代理机构： Oliff & Berridge, PLC
- 优先权： FR0700801 20070205
- 主分类号： H01H51/22
- IPC分类号： H01H51/22
摘要：
The actuation microsystem is produced on a flat substrate and comprises a pivoting arm mounted in rotation around a hinge, a stationary contact pad arranged on the substrate, and an end of opening travel stop of the pivoting arm. The end of travel stop comprises a top part, for example a head, arranged above and at a distance from the pivoting arm between an articulation end and a free end of the pivoting arm. The stop comprises a bottom part arranged laterally with respect to the pivoting arm, between the hinge and the stationary contact pad, and formed for example by a foot comprising a support pad formed on the substrate, a pedestal extending the support pad and a support portion of the head.
公开/授权文献
- US20080186117A1 Actuation microsystem and method of producing same 公开/授权日：2008-08-07
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