发明授权
US07829866B2 Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
失效
使用可变梯度偶极子的宽能谱带状离子束准直
- 专利标题: Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
- 专利标题(中): 使用可变梯度偶极子的宽能谱带状离子束准直
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申请号: US12228473申请日: 2008-08-13
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公开(公告)号: US07829866B2公开(公告)日: 2010-11-09
- 发明人: Kenneth H. Purser , Norman L. Turner
- 申请人: Kenneth H. Purser , Norman L. Turner
- 代理机构: Nields, Lemack & Frame, LLC
- 主分类号: H01J3/20
- IPC分类号: H01J3/20
摘要:
A method and apparatus satisfying growing demands for improving the intensity of implanting ions that impact a semiconductor wafer as it passes under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes for combating the disruptive effects of ion-beam induced space-charge forces. The design of the novel optical elements makes possible: (1) Focusing of a ribbon ion beam as the beam passes through uniform or non-uniform magnetic fields; (2) Reduction of the losses of ions comprising a d.c. ribbon beam to the magnetic poles when a ribbon beam is deflected by a magnetic field.
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