发明授权
US07829866B2 Broad energy-range ribbon ion beam collimation using a variable-gradient dipole 失效
使用可变梯度偶极子的宽能谱带状离子束准直

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole
摘要:
A method and apparatus satisfying growing demands for improving the intensity of implanting ions that impact a semiconductor wafer as it passes under an ion beam. The method and apparatus are directed to the design and combination together of novel magnetic ion-optical transport elements for implantation purposes for combating the disruptive effects of ion-beam induced space-charge forces. The design of the novel optical elements makes possible: (1) Focusing of a ribbon ion beam as the beam passes through uniform or non-uniform magnetic fields; (2) Reduction of the losses of ions comprising a d.c. ribbon beam to the magnetic poles when a ribbon beam is deflected by a magnetic field.
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