Invention Grant
- Patent Title: Three-dimensional structure and its manufacturing method
- Patent Title (中): 三维结构及其制造方法
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Application No.: US11654658Application Date: 2007-01-18
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Publication No.: US07825567B2Publication Date: 2010-11-02
- Inventor: Isao Shimoyama , Kiyoshi Matsumoto , Kazunori Hoshino , Kentaro Noda , Shuji Hachitani , Hidehiro Yoshida , Shoichi Kobayashi , Tohru Nakamura
- Applicant: Isao Shimoyama , Kiyoshi Matsumoto , Kazunori Hoshino , Kentaro Noda , Shuji Hachitani , Hidehiro Yoshida , Shoichi Kobayashi , Tohru Nakamura
- Applicant Address: JP Osaka JP Tokyo
- Assignee: Panasonic Corporation,National University Corporation, The University of Tokyo
- Current Assignee: Panasonic Corporation,National University Corporation, The University of Tokyo
- Current Assignee Address: JP Osaka JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2006-012614 20060120
- Main IPC: H01L41/053
- IPC: H01L41/053
Abstract:
A plurality of micro three-dimensional structure elements each having a movable structure fixed on a sacrifice layer, and fixation portions of the micro three-dimensional structure elements for the sacrifice layer are arranged into a film-like elastic body, and then the sacrifice layer is removed. Thus, a three-dimensional structure in which the individual micro three-dimensional structure elements are arranged independently of one another within the elastic body is manufactured.
Public/Granted literature
- US20070188285A1 Three-dimensional structure and its manufacturing method Public/Granted day:2007-08-16
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