发明授权
- 专利标题: Method for producing semiconductor device and semiconductor device
- 专利标题(中): 半导体器件和半导体器件的制造方法
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申请号: US11588407申请日: 2006-10-27
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公开(公告)号: US07781262B2公开(公告)日: 2010-08-24
- 发明人: Kenichi Hayashi , Hisashi Kawafuji , Tatsuyuki Takeshita , Nobuhito Funakoshi , Hiroyuki Ozaki
- 申请人: Kenichi Hayashi , Hisashi Kawafuji , Tatsuyuki Takeshita , Nobuhito Funakoshi , Hiroyuki Ozaki
- 申请人地址: JP Chiyoda-Ku, Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JP Chiyoda-Ku, Tokyo
- 代理机构: Buchanan Ingersoll & Rooney PC
- 优先权: JP2003-358815 20031020
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The method of producing a semiconductor device in which chips are resin-molded, including steps of: preparing frames having front and back surfaces and die pads; preparing an insulation resin sheet having a first and a second surfaces; preparing a resin-sealing metal mold having cap pins; mounting the resin sheet inside the resin-sealing metal mold in such a manner that the second surface of the resin sheet contacts an inner bottom surface of the resin-sealing metal mold; mounting power chips on the surfaces of the die pads; positioning the frames on the first surface of the resin sheet in such a manner that the back surfaces of the die pads contact the first surface of the resin sheet; pressing the die pads toward the resin sheet using the cap pins and fixing the die pads; injecting a sealing resin in the resin-sealing metal mold and hardening the sealing resin; and removing the semiconductor device in which the power chips are molded with the sealing resin out from the resin-sealing metal mold. The resin sheet may include a metal foil which is disposed to the second surface.
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