发明授权
US07759846B2 Piezoelectric device, process for driving for driving the piezoelectric device, and piezoelectric actuator 有权
压电器件,用于驱动压电器件的驱动方法和压电致动器

Piezoelectric device, process for driving for driving the piezoelectric device, and piezoelectric actuator
摘要:
A piezoelectric device constituted by a piezoelectric body and electrodes. The piezoelectric body is a monocrystalline piezoelectric film formed, above a substrate, of an inorganic crystalline compound containing a first ferroelectric crystal when no electric field is applied to the piezoelectric film, and having a characteristic that phase transition of at least a portion of the first ferroelectric crystal to a second ferroelectric crystal occurs when the electric field strength applied to the piezoelectric film is at or above a predetermined level E1, the first and second ferroelectric crystals correspond to different crystal systems, and the piezoelectric device is driven under a condition that the minimum strength Emin, the maximum strength Emax, and the predetermined level E1 of the applied electric field satisfy the inequalities, Emin
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