发明授权
- 专利标题: Piezoelectric device, process for driving for driving the piezoelectric device, and piezoelectric actuator
- 专利标题(中): 压电器件,用于驱动压电器件的驱动方法和压电致动器
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申请号: US12118461申请日: 2008-05-09
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公开(公告)号: US07759846B2公开(公告)日: 2010-07-20
- 发明人: Yukio Sakashita , Tsutomu Sasaki
- 申请人: Yukio Sakashita , Tsutomu Sasaki
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2007-128412 20070514
- 主分类号: H01L41/08
- IPC分类号: H01L41/08

摘要:
A piezoelectric device constituted by a piezoelectric body and electrodes. The piezoelectric body is a monocrystalline piezoelectric film formed, above a substrate, of an inorganic crystalline compound containing a first ferroelectric crystal when no electric field is applied to the piezoelectric film, and having a characteristic that phase transition of at least a portion of the first ferroelectric crystal to a second ferroelectric crystal occurs when the electric field strength applied to the piezoelectric film is at or above a predetermined level E1, the first and second ferroelectric crystals correspond to different crystal systems, and the piezoelectric device is driven under a condition that the minimum strength Emin, the maximum strength Emax, and the predetermined level E1 of the applied electric field satisfy the inequalities, Emin
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