发明授权
- 专利标题: Nitride semiconductor device
- 专利标题(中): 氮化物半导体器件
-
申请号: US12213005申请日: 2008-06-12
-
公开(公告)号: US07750369B2公开(公告)日: 2010-07-06
- 发明人: Hiroaki Ohta , Hirotaka Otake
- 申请人: Hiroaki Ohta , Hirotaka Otake
- 申请人地址: JP Kyoto
- 专利权人: ROHM Co., Ltd.
- 当前专利权人: ROHM Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Rabin & Berdo, P.C.
- 优先权: JP2007-156458 20070613
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A nitride semiconductor device according to the present invention includes: a nitride semiconductor laminated structure comprising a first layer made of a Group III nitride semiconductor, a second layer laminated on the first layer and made of an Al-containing Group III nitride semiconductor with a composition that differs from that of the first layer, the nitride semiconductor laminated structure comprising a stripe-like trench exposing a lamination boundary between the first layer and the second layer; a gate electrode formed to oppose the lamination boundary; and a source electrode and a drain electrode, having the gate electrode interposed therebetween, each connected electrically to the second layer.
公开/授权文献
- US20080315256A1 Nitride semiconductor device 公开/授权日:2008-12-25
信息查询
IPC分类: