发明授权
US07750321B2 Positioning device for positioning an aperture plate in an ion beam
失效
用于将孔板定位在离子束中的定位装置
- 专利标题: Positioning device for positioning an aperture plate in an ion beam
- 专利标题(中): 用于将孔板定位在离子束中的定位装置
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申请号: US11854910申请日: 2007-09-13
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公开(公告)号: US07750321B2公开(公告)日: 2010-07-06
- 发明人: Gabriel Kienlen
- 申请人: Gabriel Kienlen
- 申请人地址: DE Freiburg
- 专利权人: Micronas GmbH
- 当前专利权人: Micronas GmbH
- 当前专利权人地址: DE Freiburg
- 代理机构: The Webb Law Firm
- 优先权: EP07015469 20070807
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/36
摘要:
A positioning device for positioning an aperture plate in an ion beam of an ion implantation system has two fixture parts that can be moved relative to each other by means of at least one positioning drive, of which the one fixture part can be connected or is connected to an abutment point that is disposed in a fixed location relative to an ion beam source, and the other fixture part can be connected or is connected to the aperture plate. An adjustment device has a fixture device and a display device. By means of the position-changing device, it is possible to change the position of at least one of the fixture parts relative to the positioning drive. By means of the display device it is possible to check whether the fixture parts are in a predetermined position relative to each other. On the first fixture part or in a part that is connected thereto in a fixed position, the display device has at least one reference mark and on the second fixture part at least one optical projection device by which means at least one optical marking that is assigned to a reference mark, of which at least one must be present, can be projected onto the first fixture part.
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