发明授权
US07741178B2 Method for fabricating vertical channel transistor in semiconductor device
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在半导体器件中制造垂直沟道晶体管的方法
- 专利标题: Method for fabricating vertical channel transistor in semiconductor device
- 专利标题(中): 在半导体器件中制造垂直沟道晶体管的方法
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申请号: US12164463申请日: 2008-06-30
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公开(公告)号: US07741178B2公开(公告)日: 2010-06-22
- 发明人: Hong-Gu Yi
- 申请人: Hong-Gu Yi
- 申请人地址: KR Kyoungki-Do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Kyoungki-Do
- 代理机构: Lowe Hauptman Ham & Berner LLP
- 优先权: KR10-2007-0136513 20071224
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for fabricating a vertical channel transistor in a semiconductor device includes forming a plurality of pillars arranged in a first direction and a second direction crossing the first direction over a substrate, wherein each of the pillars includes a hard mask pattern thereon, forming a bit line region in the substrate between the pillars, forming a first sidewall insulation layer on a sidewall of each of the pillars, forming an insulation layer for filling a space between the pillars, forming a mask pattern for exposing the substrate between lines of the pillars arranged in the first direction over a resulting structure including the insulation layer, etching the insulation layer and the substrate using the mask pattern as an etch barrier to form a trench for defining a bit line in the substrate, and forming a second sidewall insulation layer over a resulting structure including the trench.
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