Invention Grant
US07732292B2 Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide 失效
双向晶体管,具有自对准逆向外基极植入轮廓和自对准硅化物

Bipolar transistor with self-aligned retrograde extrinsic base implant profile and self-aligned silicide
Abstract:
Disclosed is a method of forming a transistor in an integrated circuit structure that begins by forming a collector in a substrate and an intrinsic base above the collector. Then, the invention patterns an emitter pedestal for the lower portion of the emitter on the substrate above the intrinsic base. Before actually forming the emitter or associates spacer, the invention forms an extrinsic base in regions of the substrate not protected by the emitter pedestal. After this, the invention removes the emitter pedestal and eventually forms the emitter where the emitter pedestal was positioned.
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