发明授权
US07718574B2 Biaxially-textured film deposition for superconductor coated tapes
有权
用于超导体涂层胶带的双轴织构膜沉积
- 专利标题: Biaxially-textured film deposition for superconductor coated tapes
- 专利标题(中): 用于超导体涂层胶带的双轴织构膜沉积
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申请号: US10821010申请日: 2004-04-08
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公开(公告)号: US07718574B2公开(公告)日: 2010-05-18
- 发明人: Xuming Xiong , Venkat Selvamanickam
- 申请人: Xuming Xiong , Venkat Selvamanickam
- 申请人地址: US NY Schenectady
- 专利权人: SuperPower, Inc.
- 当前专利权人: SuperPower, Inc.
- 当前专利权人地址: US NY Schenectady
- 代理机构: Larson Newman & Abel, LLP
- 主分类号: H01L39/00
- IPC分类号: H01L39/00 ; H01B12/00 ; B05D5/12
摘要:
Methods for depositing, at a very high deposition rate, a biaxially-textured film on a continuously moving metal tape substrate are disclosed. These methods comprise: depositing a film on the substrate with a deposition flux having an oblique incident angle of about 5° to about 80° from the substrate normal, while simultaneously bombarding the deposited film using an ion beam at an ion beam incident angle arranged along either a best ion texture direction of the film or along a second best ion texture direction of the film, thereby forming the biaxially-textured film, wherein a deposition flux incident plane is arranged parallel to a direction along which the biaxially-textured film has a fast in-plane growth rate. Superconducting articles comprising a substrate, a biaxially-textured film deposited on said substrate by said methods above; and a superconducting layer disposed on the biaxially-textured film are also disclosed.
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