发明授权
- 专利标题: Bottom gate thin film transistor, flat panel display having the same and method of fabricating the same
- 专利标题(中): 底栅薄膜晶体管,具有相同的平板显示器及其制造方法
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申请号: US11232290申请日: 2005-09-21
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公开(公告)号: US07709840B2公开(公告)日: 2010-05-04
- 发明人: Keun-Soo Lee
- 申请人: Keun-Soo Lee
- 申请人地址: KR Yongin, Gyunggi-do
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR Yongin, Gyunggi-do
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: KR10-2004-0079693 20041006
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
A bottom gate thin film transistor (TFT), a flat panel display having the same, and a method of fabricating the same are disclosed. The TFT comprises a gate electrode disposed on a substrate, and a gate insulating layer disposed on the gate electrode. A semiconductor layer is disposed on the gate insulating layer and crossing over the gate electrode, and is crystallized by an MILC technique. An inter-insulating layer is disposed on the semiconductor layer and comprises source and drain contact holes which expose portions of the semiconductor layer. The source and drain contact holes are separated from at least one edge of the semiconductor layer crossing over the gate electrode. The semiconductor layer comprises conductive MIC regions corresponding to the exposed portions of the semiconductor layer in the source and drain contact holes.
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