发明授权
- 专利标题: Split gate type non-volatile memory device and method of manufacturing the same
- 专利标题(中): 分闸式非易失性存储器件及其制造方法
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申请号: US11516098申请日: 2006-09-05
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公开(公告)号: US07679126B2公开(公告)日: 2010-03-16
- 发明人: Jin Hyo Jung
- 申请人: Jin Hyo Jung
- 申请人地址: KR Seoul
- 专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: The Law Offices of Andrew D. Fortney
- 代理商 Andrew D. Fortney
- 优先权: KR10-2005-0082233 20050905
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A non-volatile memory device (e.g., a split gate type device) and a method of manufacturing the same are disclosed. The memory device includes an active region on a semiconductor substrate, a pair of floating gates above the active region, a charge storage insulation layer between each floating gate and the active region, a pair of wordlines over the active region and partially overlapping the floating gates, respectively, and a gate insulation film between each wordline and the active region. The method may prevent or reduce the incidence of conductive stringers on the active region between the floating gates, to thereby improve reliability of the memory devices and avoid the active region resistance from being increased due to the stringer.
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