发明授权
- 专利标题: Bipolar transistor and method of manufacturing the same
- 专利标题(中): 双极晶体管及其制造方法
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申请号: US11632614申请日: 2005-07-07
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公开(公告)号: US07671447B2公开(公告)日: 2010-03-02
- 发明人: Andreas Hubertus Montree , Jan Willem Slotboom , Prabhat Agarwal , Philippe Meunier-Beillard
- 申请人: Andreas Hubertus Montree , Jan Willem Slotboom , Prabhat Agarwal , Philippe Meunier-Beillard
- 申请人地址: NL Eindhoven
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: NL Eindhoven
- 优先权: EP04103382 20040715
- 国际申请: PCT/IB2005/052260 WO 20050707
- 国际公布: WO2006/008689 WO 20060126
- 主分类号: H01L23/58
- IPC分类号: H01L23/58
摘要:
The invention relates to a semiconductor device (10) with a semiconductor body (12) comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) of, respectively, a first conductivity type, a second conductivity type, opposite to the first conductivity type, and the first conductivity type, wherein, viewed in projection, the emitter region (1) is positioned above or below the base region (2), and the collector region (3) laterally borders the base region (2). According to the invention, the base region (2) comprises a highly doped subregion (2A) the doping concentration of which has a delta-shaped profile in the thickness direction, and said highly doped sub-region (2A) extends laterally as far as the collector region (3). Such a lateral bipolar transistor has excellent high-frequency properties and a relatively high breakdown voltage between the base and collector regions (2, 3), implying that the device is suitable for high power applications. The doping concentration lies preferably between about 1019 and about 1020 at/cm3, and the thickness of the sub-region (2A) lies between 1 and 15 nm and preferably between 1 and 10 nm. The invention also comprises a method of manufacturing such a device (10).
公开/授权文献
- US20080083968A1 Bipolar Transistor And Method Of Manufacturing The Same 公开/授权日:2008-04-10
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