发明授权
US07652750B2 Lithography exposure device having a plurality of radiation sources
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具有多个辐射源的平版印刷曝光装置
- 专利标题: Lithography exposure device having a plurality of radiation sources
- 专利标题(中): 具有多个辐射源的平版印刷曝光装置
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申请号: US11392970申请日: 2006-03-28
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公开(公告)号: US07652750B2公开(公告)日: 2010-01-26
- 发明人: Hans Opower , Stefan Scharl
- 申请人: Hans Opower , Stefan Scharl
- 申请人地址: DE Tettnang
- 专利权人: KLEO Halbleitertechnik GmbH & Co KG
- 当前专利权人: KLEO Halbleitertechnik GmbH & Co KG
- 当前专利权人地址: DE Tettnang
- 代理机构: Lipsitz & McAllister, LLC
- 优先权: DE10346201 20030929
- 主分类号: G03B27/52
- IPC分类号: G03B27/52
摘要:
A lithography exposure device is provided which includes a mounting device for the layer sensitive to light, an exposure unit with several laser radiation sources, an optical focusing means associated with the laser radiation sources, a movement unit for generating a relative movement between the optical focusing means and the mounting device, and a control for controlling intensity and position of exposure spots so that exposed structures which are as precisely structured as possible can be produced. A laser radiation field propagating in the direction of the light-sensitive layer generates each of the exposure spots from respective focal points and has a power density which leads in the conversion area in the light-sensitive layer to formation of a channel penetrating the light-sensitive layer with an index of refraction increased in relation to its surroundings by the Kerr effect and which guides the laser radiation field in a spatially limited manner.
公开/授权文献
- US20060170893A1 Lithography exposure device 公开/授权日:2006-08-03
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