发明授权
US07652324B2 NAND type dual bit nitride read only memory and method for fabricating the same
有权
NAND型双位氮化物只读存储器及其制造方法
- 专利标题: NAND type dual bit nitride read only memory and method for fabricating the same
- 专利标题(中): NAND型双位氮化物只读存储器及其制造方法
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申请号: US11655259申请日: 2007-01-19
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公开(公告)号: US07652324B2公开(公告)日: 2010-01-26
- 发明人: Chien-Hung Liu
- 申请人: Chien-Hung Liu
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rabin & Berdo, P.C.
- 优先权: TW92119086A 20030711
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
A NAND type dual bit nitride read only memory and a method for fabricating thereof are provided. Firstly, a plurality of isolation layers, which are spaced and parallel to each other are formed in the substrate. Next, a plurality of word lines and a plurality of oxide-nitride-oxide (ONO) stack structures are formed on the substrate. The word lines are spaced and parallel to each other, and also the word lines are perpendicular to the isolation layers. Each of the ONO stack structure is located between the corresponding word line and the substrate. And then a plurality of discontinuous bit lines, which are located between the word lines and between the isolation layers are formed on the substrate. The structure of the present invention of the NAND type dual bit nitride read only memory is similar to that of a complementary metal-oxide semiconductor (CMOS), and their fabrication processes are fully compatible.
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