发明授权
- 专利标题: Laser atom probe methods
- 专利标题(中): 激光原子探针方法
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申请号: US11597080申请日: 2004-08-19
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公开(公告)号: US07652269B2公开(公告)日: 2010-01-26
- 发明人: Joseph Hale Bunton , Jesse D. Olson
- 申请人: Joseph Hale Bunton , Jesse D. Olson
- 申请人地址: US WI Madison
- 专利权人: Imago Scientific Instruments Corporation
- 当前专利权人: Imago Scientific Instruments Corporation
- 当前专利权人地址: US WI Madison
- 代理机构: Perkins Coie LLP
- 国际申请: PCT/US2004/026823 WO 20040819
- 国际公布: WO2005/122210 WO 20051222
- 主分类号: G01B5/28
- IPC分类号: G01B5/28 ; H01J37/285 ; H01J49/00
摘要:
A laser atom probe (100) situates a counter electrode between a specimen mount and a detector (106), and provides a laser (116) having its beam (122) aligned to illuminate the specimen (104) through the aperture (110) of the counter electrode (108). The detector, specimen mount (102), and/or the counter electrode may be charged to some boost voltage and then be pulsed to bring the specimen to ionization. The timing of the laser pulses may be used to determine ion departure and arrival times allowing determination of the mass-to-charge ratios of the ions, thus their identities. Automated alignment methods are described wherein the laser is automatically directed to areas of interest.
公开/授权文献
- US20070181826A1 Laser atom probe methods 公开/授权日:2007-08-09
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