Invention Grant
- Patent Title: MEMS microswitch having a conductive mechanical stop
- Patent Title (中): MEMS微动开关具有导电的机械停止
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Application No.: US11961767Application Date: 2007-12-20
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Publication No.: US07609136B2Publication Date: 2009-10-27
- Inventor: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
- Applicant: Xuefeng Wang , Kanakasabapathi Subramanian , Christopher Fred Keimel , Marco Francesco Aimi , Kuna Venkat Satya Rama Kishore , Glenn Scott Claydon , Oliver Charles Boomhower , Parag Thakre
- Applicant Address: US NY Niskayuna
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Niskayuna
- Agent Richard Emery
- Main IPC: H01H51/22
- IPC: H01H51/22
Abstract:
A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.
Public/Granted literature
- US20090159410A1 MEMS MICROSWITCH HAVING A CONDUCTIVE MECHANICAL STOP Public/Granted day:2009-06-25
Information query
