发明授权
- 专利标题： Device consisting of at least one optical element
- 专利标题（中）： 装置由至少一个光学元件组成
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申请号： US11509154申请日： 2006-08-24
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公开(公告)号： US07603010B2公开(公告)日： 2009-10-13
- 发明人: Yim-Bun Patrick Kwan , Michael Mühlbeyer , Johannes Lippert
- 申请人： Yim-Bun Patrick Kwan , Michael Mühlbeyer , Johannes Lippert
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- 主分类号： G02B6/26
- IPC分类号： G02B6/26
摘要：
An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees of freedom and is characterized in that the at least one sensor is located at least substantially diagonally opposite to the least one actuator.
公开/授权文献
- US20070047876A1 Device consisting of at least one optical element 公开/授权日：2007-03-01
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