Invention Grant
- Patent Title: Method of fabricating static random access memory
- Patent Title (中): 制造静态随机存取存储器的方法
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Application No.: US11261266Application Date: 2005-10-28
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Publication No.: US07598141B2Publication Date: 2009-10-06
- Inventor: Chang-Hoon Lee , Sang-Jin Park , Won-Seok Yoo , Kong-Soo Lee
- Applicant: Chang-Hoon Lee , Sang-Jin Park , Won-Seok Yoo , Kong-Soo Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR10-2004-0096168 20041123
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of fabricating a static random access memory device includes selectively removing an insulating film and growing a single crystalline silicon layer using selective epitaxy growth, the single crystalline silicon layer being grown in a portion from which the insulating film is removed; recessing the insulating film; and depositing an amorphous silicon layer on the single crystalline silicon layer and the insulating film, such that the amorphous silicon layer partially surrounds a top surface and side surfaces of the single crystalline silicon layer.
Public/Granted literature
- US20060108575A1 Method of fabricating static random access memory Public/Granted day:2006-05-25
Information query
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