Invention Grant
US07569112B2 Scanning probe apparatus with in-situ measurement probe tip cleaning capability
失效
扫描探头设备具有原位测量探头尖端清洁能力
- Patent Title: Scanning probe apparatus with in-situ measurement probe tip cleaning capability
- Patent Title (中): 扫描探头设备具有原位测量探头尖端清洁能力
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Application No.: US11687033Application Date: 2007-03-16
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Publication No.: US07569112B2Publication Date: 2009-08-04
- Inventor: Lin Zhou , Dmitriy Shneyder
- Applicant: Lin Zhou , Dmitriy Shneyder
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Rosa Suazo Yaghmour, Esq.
- Main IPC: B08B11/00
- IPC: B08B11/00 ; B08B6/00 ; G12B21/00 ; G01N13/10 ; H01J99/00
Abstract:
A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus.
Public/Granted literature
- US20080223118A1 SCANNING PROBE APPARATUS WITH IN-SITU MEASUREMENT PROBE TIP CLEANING CAPABILITY Public/Granted day:2008-09-18
Information query
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