Invention Grant
- Patent Title: Piezoelectric actuator and method of fabricating piezoelectric actuator
- Patent Title (中): 压电致动器及其制造方法
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Application No.: US11083953Application Date: 2005-03-21
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Publication No.: US07565723B2Publication Date: 2009-07-28
- Inventor: Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
- Applicant: Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
- Applicant Address: JP Nagoya JP Tokyo
- Assignee: Brother Kogyo Kabushik Kaisha,National Institute of Advanced Industrial Science and Technology
- Current Assignee: Brother Kogyo Kabushik Kaisha,National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP Nagoya JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-100239 20040330
- Main IPC: H01L41/22
- IPC: H01L41/22
Abstract:
A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.
Public/Granted literature
- US20050231073A1 Piezoelectric actuator, inkjet head and fabrication methods thereof Public/Granted day:2005-10-20
Information query
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