Invention Grant
US07531792B2 Analyzing chamber including a leakage ion beam detector and mass analyzer including the same
有权
分析室包括一个泄漏离子束检测器和包括它的质量分析仪
- Patent Title: Analyzing chamber including a leakage ion beam detector and mass analyzer including the same
- Patent Title (中): 分析室包括一个泄漏离子束检测器和包括它的质量分析仪
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Application No.: US11489437Application Date: 2006-07-20
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Publication No.: US07531792B2Publication Date: 2009-05-12
- Inventor: Hyun-Sub Earm , Seung-Se Lee , Young-Dae Kim , Gon-Su Kang , Sung-Yeul An
- Applicant: Hyun-Sub Earm , Seung-Se Lee , Young-Dae Kim , Gon-Su Kang , Sung-Yeul An
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0066517 20050722
- Main IPC: B01D59/44
- IPC: B01D59/44 ; H01J49/00 ; H01J1/50 ; A61N5/00 ; G21F5/00 ; G21F1/00 ; G21F3/00 ; G21F7/00 ; G21C11/00
Abstract:
In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.
Public/Granted literature
- US20070018093A1 Analyzing chamber including a leakage ion beam detector and mass analyzer including the same Public/Granted day:2007-01-25
Information query
