发明授权
- 专利标题: Pattern measuring method and pattern measuring device
- 专利标题(中): 图案测量方法和图案测量装置
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申请号: US11359374申请日: 2006-02-23
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公开(公告)号: US07518110B2公开(公告)日: 2009-04-14
- 发明人: Takumichi Sutani , Ryoichi Matsuoka , Hidetoshi Morokuma , Hitoshi Komuro , Akiyuki Sugiyama
- 申请人: Takumichi Sutani , Ryoichi Matsuoka , Hidetoshi Morokuma , Hitoshi Komuro , Akiyuki Sugiyama
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2005-049923 20050225
- 主分类号: G01B9/00
- IPC分类号: G01B9/00
摘要:
A pattern measuring method and device are provided which set a reference position for a measuring point to be measured by a scanning electron microscope and the like, based on position information of a reference pattern on an image acquired from the scanning electron microscope and based on a positional relation, detected by using design data, between the measuring point and the reference pattern formed at a position isolated from the measuring point.
公开/授权文献
- US20060193508A1 Pattern measuring method and pattern measuring device 公开/授权日:2006-08-31
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