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US07518110B2 Pattern measuring method and pattern measuring device 有权
图案测量方法和图案测量装置

Pattern measuring method and pattern measuring device
摘要:
A pattern measuring method and device are provided which set a reference position for a measuring point to be measured by a scanning electron microscope and the like, based on position information of a reference pattern on an image acquired from the scanning electron microscope and based on a positional relation, detected by using design data, between the measuring point and the reference pattern formed at a position isolated from the measuring point.
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