Invention Grant
US07510914B2 Semiconductor devices having fuses and methods of forming the same
有权
具有保险丝的半导体器件及其形成方法
- Patent Title: Semiconductor devices having fuses and methods of forming the same
- Patent Title (中): 具有保险丝的半导体器件及其形成方法
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Application No.: US11447944Application Date: 2006-06-07
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Publication No.: US07510914B2Publication Date: 2009-03-31
- Inventor: Hyun-Chul Yoon , Jong-Kyu Kim , Jang-Bin Yim , Sang-Dong Kwon , Sung-Gil Choi
- Applicant: Hyun-Chul Yoon , Jong-Kyu Kim , Jang-Bin Yim , Sang-Dong Kwon , Sung-Gil Choi
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0053768 20050622
- Main IPC: H01L21/82
- IPC: H01L21/82

Abstract:
Semiconductor devices having a plurality of fuses and methods of forming the same are provided. The semiconductor device having a fuse including a substrate having a cell region and/or a fuse box region. A first insulation interlayer may be formed on the substrate. A first etch stop layer may be formed on the first insulation interlayer. A metal wiring including a barrier layer, a metal layer and/or a capping layer may be formed on the first etch stop layer of the cell region. Fuses, spaced apart from each other, may be formed on the first etch stop layer of the fuse box region. Each fuse may include the barrier layer and/or the metal layer. A second insulation interlayer having an opening exposing the fuse box region may be formed on the metal wiring and/or the first etch stop layer. The etch stop layer may allow the fuses to be formed more uniformly and decrease the probability of breaking the fuses.
Public/Granted literature
- US20060289899A1 Semiconductor devices having fuses and methods of forming the same Public/Granted day:2006-12-28
Information query
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