- 专利标题: Twin insulator charge storage device operation and its fabrication method
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申请号: US11409382申请日: 2006-04-21
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公开(公告)号: US07394703B2公开(公告)日: 2008-07-01
- 发明人: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- 申请人: Seiki Ogura , Kimihiro Satoh , Tomoya Saito
- 申请人地址: US OR Hillsboro
- 专利权人: Halo LSI, Inc.
- 当前专利权人: Halo LSI, Inc.
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Saile Ackerman LLC Rosemary L. S. Pike
- 代理商 Stephen B. Ackerman
- 主分类号: G11C11/34
- IPC分类号: G11C11/34 ; G11C16/04 ; H01L29/792
摘要:
The invention proposes am improved twin MONOS memory device and its fabrication. The ONO layer is self-aligned to the control gate horizontally. The vertical insulator between the control gate and the word gate does not include a nitride layer. This prevents the problem of electron trapping. The device can be fabricated to pull the electrons out through either the top or the bottom oxide layer of the ONO insulator. The device also incorporates a raised memory bit diffusion between the control gates to reduce bit resistance. The twin MONOS memory array can be embedded into a standard CMOS circuit by the process of the present invention.
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