知搜-全球专利检索

  1. Login
  2. Sign Up
Invention Grant
US07394476B2 Methods and systems for thermal-based laser processing a multi-material device 有权
用于热基激光加工多材料装置的方法和系统

Methods and systems for thermal-based laser processing a multi-material device
Abstract:
A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
Abstract(Chinese):

提供一种用于局部处理形成在基板上的预定微结构而不引起基板或其上形成在基板上的其它结构的电学或物理特性的不期望的变化的方法和系统。 该方法包括基于与预定微结构，衬底和其它结构的激光脉冲相互作用的模型来提供信息。 基于该信息确定至少一个脉冲的至少一个特性。 生成包括至少一个脉冲的脉冲激光束。 该方法还包括将具有至少一个确定特性的至少一个脉冲照射到预定微结构上的点中。 所述至少一个脉冲的至少一个确定的特征和其它特征足以在不引起不期望的变化的情况下局部地处理预定的微结构。

Public/Granted literature
Information query
Espacenet
Patent Agency Ranking
0/0