Invention Grant
- Patent Title: Methods of base formation in a BiCMOS process
- Patent Title (中): BiCMOS工艺中碱形成的方法
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Application No.: US11231385Application Date: 2005-09-21
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Publication No.: US07390721B2Publication Date: 2008-06-24
- Inventor: Peter J. Geiss , Marwan H. Khater , Qizhi Liu , Randy W. Mann , Robert J. Purtell , BethAnn Rainey , Jae-Sung Rieh , Andreas D. Stricker
- Applicant: Peter J. Geiss , Marwan H. Khater , Qizhi Liu , Randy W. Mann , Robert J. Purtell , BethAnn Rainey , Jae-Sung Rieh , Andreas D. Stricker
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent William D. Sabo, Esq.
- Main IPC: H01L21/331
- IPC: H01L21/331

Abstract:
Methods for fabricating a heterojunction bipolar transistor having a raised extrinsic base is provided in which the base resistance is reduced by forming a silicide atop the raised extrinsic base that extends to the emitter region in a self-aligned manner. The silicide formation is incorporated into a BiCMOS process flow after the raised extrinsic base has been formed. The present invention also provides a heterojunction bipolar transistor having a raised extrinsic base and a silicide located atop the raised extrinsic base. The silicide atop the raised extrinsic base extends to the emitter in a self-aligned manner. The emitter is separated from the silicide by a spacer.
Public/Granted literature
- US20060017066A1 Methods of base formation in a BiCMOS process Public/Granted day:2006-01-26
Information query
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