Invention Grant
US07385237B2 Fin field effect transistors with low resistance contact structures
有权
具有低电阻接触结构的Fin场效应晶体管
- Patent Title: Fin field effect transistors with low resistance contact structures
- Patent Title (中): 具有低电阻接触结构的Fin场效应晶体管
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Application No.: US11076185Application Date: 2005-03-09
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Publication No.: US07385237B2Publication Date: 2008-06-10
- Inventor: Deok-Hyung Lee , In-Deog Bae , Byeong-Chan Lee , Jong-Wook Lee
- Applicant: Deok-Hyung Lee , In-Deog Bae , Byeong-Chan Lee , Jong-Wook Lee
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2004-0016384 20040311
- Main IPC: H01L29/08
- IPC: H01L29/08

Abstract:
Fin FET semiconductor devices are provided which include a substrate, an active pattern that protrudes vertically from the substrate and that extends laterally in a first direction, a device isolation layer which has a top surface that is lower than a top surface of the active pattern, a gate structure on the substrate that extends laterally in a second direction to cover a portion of the active pattern and a conductive layer that is on at least portions of side surfaces of the active pattern that are adjacent a side portion of the gate structure. The conductive layer may comprise a semiconductor layer, and the semiconductor layer may be in electrical contact with a contact pad. In other embodiments, the conductive layer may comprise a contact pad.
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