发明授权
- 专利标题: Pattern generator
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申请号: US11314413申请日: 2005-12-22
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公开(公告)号: US07365901B2公开(公告)日: 2008-04-29
- 发明人: Torbjorn Sandstrom
- 申请人: Torbjorn Sandstrom
- 申请人地址: SE Taby
- 专利权人: Micronic Laser Systems AB
- 当前专利权人: Micronic Laser Systems AB
- 当前专利权人地址: SE Taby
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/00 ; G03C5/00
摘要:
The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.
公开/授权文献
- US20060103914A1 Pattern generator 公开/授权日:2006-05-18
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