A method manufactures a nozzle plate from a substrate with using a punch group including a plurality of punches. A nozzle group has plural nozzle rows in each of which plural nozzle holes are arranged at predetermined intervals in a predetermined direction. Plural nozzle-row sets are defined to each contain at least two nozzle rows having predetermined relative positional relationship with each other. The punch group has plural punch rows each corresponding to one of the nozzle rows contained in each nozzle-row set. Punches on each punch row are arranged at intervals equivalent to the predetermined intervals. The method includes forming a first hole group in the substrate with using the punch group; moving the substrate relative to the substrate in a first direction, which crosses the predetermined direction; and forming a second hole group in the substrate with using the punch group.