A position deviation system and method detects and corrects position deviations between the optical axis of an optical system, such as an exposure apparatus, and the center of a curved shaped object, such as a spherical shaped semiconductor. The system determines position deviations by illuminating the curved surface, passing light that is reflected off of the illuminated curved surface through a first lens having an optical axis and a first body. An image having a substantially central portion is formed on a surface using the reflected light. The position deviation is determined based on a position of the substantially central portion of the formed image relative to the optical axis.