发明授权
- 专利标题： Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material
- 专利标题（中）： 具有使液体材料有效蒸发的汽化器的半导体制造系统
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申请号： US09658501申请日： 2000-09-08
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公开(公告)号： US07332040B1公开(公告)日： 2008-02-19
- 发明人: Yasuhiko Kojima , Hiroyuki Mori , Hirofumi Ono
- 申请人： Yasuhiko Kojima , Hiroyuki Mori , Hirofumi Ono
- 申请人地址： JP Tokyo JP Shiga
- 专利权人： Tokyo Electron Limited,Lintec Co., Ltd.
- 当前专利权人： Tokyo Electron Limited,Lintec Co., Ltd.
- 当前专利权人地址： JP Tokyo JP Shiga
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 优先权： JP11-256410 19990909
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; H01L21/306 ; F16K3/00 ; F16K31/02
摘要：
A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing chamber set in the depressurized atmosphere via a small aperture. An inlet of the liquid storing chamber is opened or closed by a valve body, which is moved by an actuator controlling a degree of opening of the valve body.
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