发明授权
- 专利标题: Intrinsic decoupling capacitor
- 专利标题(中): 本征去耦电容
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申请号: US11064807申请日: 2005-02-23
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公开(公告)号: US07317238B2公开(公告)日: 2008-01-08
- 发明人: Jung S. Kang , Peter P. Jeng , Michael M. DeSmith , Md Monzur Hossain , Yi-feng Liu
- 申请人: Jung S. Kang , Peter P. Jeng , Michael M. DeSmith , Md Monzur Hossain , Yi-feng Liu
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
A plurality of N-doped strip portions are formed alternating with a plurality of P-doped regions. When a voltage is applied to the N-doped strip portions, a capacitance is created between the N-doped strip portions and the P-doped strip portions. A capacitance is also created between the N-doped strip portions and the underlying epitaxial silicon layer. A larger interface area between N-doped and P-doped regions generally increases the capacitance. By providing the N-doped strip portions, as opposed to a continuous N-doped region, the combined interface area between the N-doped strip portions and the underlying epitaxial silicon layer is reduced. However, more interface area is provided between the N-doped strip portions and the P-doped strip portions. A circuit simulation indicates that junction capacitance per unit peripheral length is 0.41 fF/μm, while the junction capacitance per unit area is 0.19 fF/μm^2. Junction capacitance per unit peripheral length thus scales faster than junction capacitance per unit area.
公开/授权文献
- US20060189059A1 Intrinsic decoupling capacitor 公开/授权日:2006-08-24
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