发明授权
- 专利标题: Die handling system
- 专利标题(中): 模具处理系统
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申请号: US10959931申请日: 2004-10-06
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公开(公告)号: US07276396B2公开(公告)日: 2007-10-02
- 发明人: Jason A. Garcia
- 申请人: Jason A. Garcia
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Buckley, Maschoff & Talwalkar LLC
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A system may include singulation of a semiconductor wafer to separate a plurality of integrated circuit die that are integrated into the semiconductor wafer; coupling of a support to an integrated circuit substrate of one of the plurality of integrated circuit die, and decoupling of the one integrated circuit die from the singulated semiconductor wafer while the support is coupled to the integrated circuit substrate. According to some embodiments, a second side of the one integrated circuit die is not touched during the coupling and the decoupling, the second side being opposite to the integrated circuit substrate.
公开/授权文献
- US20060073632A1 Die handling system 公开/授权日:2006-04-06
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