Invention Grant
- Patent Title: Photoresist composition
- Patent Title (中): 光刻胶组成
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Application No.: US11174872Application Date: 2005-07-05
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Publication No.: US07195854B2Publication Date: 2007-03-27
- Inventor: Hoon Kang , Seung-uk Lee , Woo-sik Jun , Dae-youn Park , Ju-hyuk Kim , Byung-uk Kim
- Applicant: Hoon Kang , Seung-uk Lee , Woo-sik Jun , Dae-youn Park , Ju-hyuk Kim , Byung-uk Kim
- Applicant Address: KR
- Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee: Dongjin Semichem Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2004-0052124 20040705
- Main IPC: G03F7/023
- IPC: G03F7/023
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Abstract:
The present invention provides a photoresist composition and more particularly, a photoresist composition comprising a) a novolak resin, b) a diazide compound, and c) a solvent containing propylene glycol methyl ether acetate (PGMEA) and 2,2,4-triemthyl-1,3-penthanediolmonoisobutylate (TMPMB). The photoresist composition according to the invention has excellent coating uniformity and stain inhibitory properties after coating so that it can be easily applied to real industrial fields and it can improve working environments due to the reduction of amounts to be consumed, the decrease of time to be required for manufacture, etc. when manufactured on a large scale.
Public/Granted literature
- US20060008728A1 Photoresist composition Public/Granted day:2006-01-12
Information query
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