- 专利标题: Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
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申请号: US10414860申请日: 2003-04-15
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公开(公告)号: US07187449B2公开(公告)日: 2007-03-06
- 发明人: Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda , Hidehiro Kume
- 申请人: Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda , Hidehiro Kume
- 申请人地址: JP Tokyo
- 专利权人: Sony Precision Technology Inc.
- 当前专利权人: Sony Precision Technology Inc.
- 当前专利权人地址: JP Tokyo
- 代理机构: Haverstock & Owens LLP
- 优先权: JPP2002-127525 20020426; JPP2002-127526 20020426; JPP2002-127527 20020426
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
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