Invention Grant
- Patent Title: Thin-film devices and method for fabricating the same on same substrate
- Patent Title (中): 薄膜器件及其制造方法
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Application No.: US10954674Application Date: 2004-09-30
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Publication No.: US07180156B2Publication Date: 2007-02-20
- Inventor: Shih-Chang Chang , Yaw-Ming Tsai
- Applicant: Shih-Chang Chang , Yaw-Ming Tsai
- Applicant Address: TW Chu-Nan
- Assignee: TPO Displays Corp.
- Current Assignee: TPO Displays Corp.
- Current Assignee Address: TW Chu-Nan
- Agency: Liu & Liu
- Priority: TW93110215A 20040413
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
To satisfy the different requirement of TFTs function as peripheral driving circuit and pixel switching device, the modified TFT structure with various thicknesses of gate insulating layers is disclosed. For the peripheral driving circuit, the thinner thickness of the gate-insulating layer is formed, the higher driving ability the TFT performs. However, for the pixel switching device, the thicker thickness of the gate insulating layer is formed, the better reliability the TFT has. The present invention provides a first TFT (peripheral driving circuit) comprising a first gate insulating layer and a second TFT (pixel switching device) comprising a first and second gate insulating layer. Thus, the gate insulating layer of the peripheral driving circuit has a thickness less then that of the pixel switching device.
Public/Granted literature
- US20050224793A1 Thin-film devices and method for fabricating the same on same substrate Public/Granted day:2005-10-13
Information query
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