发明授权
- 专利标题: Integrated resistive elements with silicidation protection
- 专利标题(中): 具有硅化保护的集成电阻元件
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申请号: US10672293申请日: 2003-09-26
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公开(公告)号: US07176553B2公开(公告)日: 2007-02-13
- 发明人: Alessandro Grossi , Roberto Bez , Giorgio Servalli
- 申请人: Alessandro Grossi , Roberto Bez , Giorgio Servalli
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Jenkens & Gilchrist, PC
- 优先权: EP02425586 20020930
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
In a process for the fabrication of integrated resistive elements with protection from silicidation, at least one active area (15) is delimited in a semiconductor wafer (10). At least one resistive region (21) having a pre-determined resistivity is then formed in the active area (15). Prior to forming the resistive region (21), however, a delimitation structure (20) for delimiting the resistive region (21) is obtained on top of the active area (15). Subsequently, protective elements (25) are obtained which extend within the delimitation structure (20) and coat the resistive region (21).
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