Invention Grant
- Patent Title: Positive resist composition and patterning process
- Patent Title (中): 正抗蚀剂组成和图案化工艺
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Application No.: US10936621Application Date: 2004-09-09
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Publication No.: US07175960B2Publication Date: 2007-02-13
- Inventor: Tomoyoshi Furihata , Hideto Kato
- Applicant: Tomoyoshi Furihata , Hideto Kato
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2003-321824 20030912
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/30

Abstract:
A positive resist composition comprising a mixture of an alkali-soluble novolak resin prepared using m-cresol, p-cresol and 2,5-xylenol as starting reactants and a phenolic compound, wherein the hydrogen atoms of all hydroxyl groups are substituted in a proportion of 0.03–0.05 mol per hydrogen atom with 1,2-naphthoquinonediazidosulfonyl ester groups, has uniformity, high sensitivity and high resolution, and is improved in heat resistance, film retention, substrate adhesion, and storage stability.
Public/Granted literature
- US20050058937A1 Positive resist composition and patterning process Public/Granted day:2005-03-17
Information query
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