Invention Grant
- Patent Title: Semiconductor memory device having self-aligned contacts and method of fabricating the same
- Patent Title (中): 具有自对准触点的半导体存储器件及其制造方法
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Application No.: US11054593Application Date: 2005-02-09
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Publication No.: US07132708B2Publication Date: 2006-11-07
- Inventor: Tae-hyuk Ahn , Myeong-cheol Kim , Jung-hyeon Lee , Byeong-yun Nam , Gyung-jin Min
- Applicant: Tae-hyuk Ahn , Myeong-cheol Kim , Jung-hyeon Lee , Byeong-yun Nam , Gyung-jin Min
- Applicant Address: KR Suwon
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: F. Chau & Associates, LLC
- Priority: KR00-35704 20000627
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119

Abstract:
A semiconductor memory device having self-aligned contacts, capable of preventing a short-circuit between contacts for bit lines and contacts for storage electrodes and improving a process margin, and a method of fabricating the same are provided. The semiconductor memory device having self-aligned contacts includes a plurality of gate electrode patterns arranged in parallel on a semiconductor substrate, in which a plurality of first spacers are formed along the sidewalls of the gate electrode patterns, a first interdielectric layer formed on the entire surface of a resultant in which the first spacers are formed, a plurality of bit line patterns arranged in parallel on the first interdielectric layer to be perpendicular to the gate electrode patterns, in which a plurality of second spacers are formed along the sidewalls of the bit line patterns, a plurality of contacts for bit lines self-aligned with the first spacers, a second interdielectric layer formed on the entire surface of a resultant in which the second spacers are formed, and a plurality of contacts for storage electrodes simultaneously self-aligned with the second and first spacers.
Public/Granted literature
- US20050167758A1 Semiconductor memory device having self-aligned contacts and method of fabricating the same Public/Granted day:2005-08-04
Information query
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