Invention Grant
- Patent Title: Capacitor constructions
- Patent Title (中): 电容器结构
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Application No.: US11003642Application Date: 2004-12-03
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Publication No.: US07126181B2Publication Date: 2006-10-24
- Inventor: Denise M. Eppich , Ronald A. Weimer
- Applicant: Denise M. Eppich , Ronald A. Weimer
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The invention includes methods of forming circuit devices. A metal-containing material comprising a thickness of no more than 20 Å (or alternatively comprising a thickness resulting from no more than 70 ALD cycles) is formed between conductively-doped silicon and a dielectric layer. The conductively-doped silicon can be n-type silicon and the dielectric layer can be a high-k dielectric material. The metal-containing material can be formed directly on the dielectric layer, and the conductively-doped silicon can be formed directly on the metal-containing material. The circuit device can be a capacitor construction or a transistor construction. If the circuit device is a transistor construction, such can be incorporated into a CMOS assembly. Various devices of the present invention can be incorporated into memory constructions, and can be incorporated into electronic systems.
Public/Granted literature
- US20050101078A1 Capacitor constructions Public/Granted day:2005-05-12
Information query
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