发明授权
- 专利标题: Dielectric isolation type semiconductor device and method for manufacturing the same
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申请号: US11354961申请日: 2006-02-16
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公开(公告)号: US07125780B2公开(公告)日: 2006-10-24
- 发明人: Hajime Akiyama , Shinichi Izuo
- 申请人: Hajime Akiyama , Shinichi Izuo
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2003-415253 20031212
- 主分类号: H01L21/331
- IPC分类号: H01L21/331
摘要:
A dielectric isolation type semiconductor device and a manufacturing method therefor achieve high dielectric resistance while preventing the dielectric strength of the semiconductor device from being limited depending on the thickness of a dielectric layer and the thickness of a first semiconductor layer. A semiconductor substrate (1) and an n− type semiconductor layer (2) are bonded to each other through a buried oxide film layer (3). A first porous oxide film area (10) is formed in the semiconductor substrate in a state contacting with the buried oxide film layer. A power device is formed on the n− type semiconductor layer. The first porous oxide film area is formed in an area including a location right under a first main electrode (6) and extending from the first main electrode side up to a range of more than 40% of a distance (L) between the first and second main electrodes (6, 7).
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