发明授权
- 专利标题： Method of manufacturing waveguide type optical element and integrated optical waveguide type element using waveguide type optical element
- 专利标题（中）： 使用波导型光学元件制造波导型光学元件和集成光波导型元件的方法
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申请号： US10059149申请日： 2002-01-31
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公开(公告)号： US07118932B2公开(公告)日： 2006-10-10
- 发明人: Koji Nakamura
- 申请人： Koji Nakamura
- 申请人地址： JP Tokyo
- 专利权人： Oki Electric Industry Co., Ltd.
- 当前专利权人： Oki Electric Industry Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Volentine Francos & Whitt, PLLC
- 优先权： JP2001-336642 20011101
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method of manufacturing a waveguide type optical element wherein Zn is selectively diffused on a light absorption layer using an undoped InP layer. Since an impurity diffusion area is made on the light absorption layer under a ridge part, a depletion layer becomes thin in a thickness direction and an electric field can strongly be applied. Thereby, an extinction ratio characteristic of a device can be improved.
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