Invention Grant
US07107929B2 Ion implantation ion source, system and method 有权
离子注入离子源,系统和方法

Ion implantation ion source, system and method
Abstract:
An ion source for an ion implantation system includes a vaporizer for producing a process gas; an electron source for generating an electron beam to ionize the process gas within a ionization chamber. The ionization chamber includes an extraction aperture for extracting an ion beam. The ion source, in accordance with the preset invention, is configured to be able to be retrofit into the design space of existing ion sources in, for example, Bernas source-based ion implanters.
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