Invention Grant
- Patent Title: Ion implantation ion source, system and method
- Patent Title (中): 离子注入离子源,系统和方法
-
Application No.: US10170512Application Date: 2002-06-12
-
Publication No.: US07107929B2Publication Date: 2006-09-19
- Inventor: Thomas Neil Horsky , John Noel Williams
- Applicant: Thomas Neil Horsky , John Noel Williams
- Applicant Address: US MA Billerica
- Assignee: SemEquip, Inc.
- Current Assignee: SemEquip, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Katten Muchin Rosenman
- Agent John S. Paniaguas
- Main IPC: A01C7/00
- IPC: A01C7/00 ; H01J7/24

Abstract:
An ion source for an ion implantation system includes a vaporizer for producing a process gas; an electron source for generating an electron beam to ionize the process gas within a ionization chamber. The ionization chamber includes an extraction aperture for extracting an ion beam. The ion source, in accordance with the preset invention, is configured to be able to be retrofit into the design space of existing ion sources in, for example, Bernas source-based ion implanters.
Public/Granted literature
- US20030230986A1 Ion implantation ion source, system and method Public/Granted day:2003-12-18
Information query