Invention Grant
- Patent Title: Double sided container process used during the manufacture of a semiconductor device
- Patent Title (中): 在制造半导体器件期间使用的双面容器工艺
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Application No.: US10786348Application Date: 2004-02-24
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Publication No.: US07084448B2Publication Date: 2006-08-01
- Inventor: Scott J. DeBoer , Ronald A. Weimer , John T. Moore
- Applicant: Scott J. DeBoer , Ronald A. Weimer , John T. Moore
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agent Kevin D. Martin
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119

Abstract:
A method used during the formation of a semiconductor device comprises providing a wafer substrate assembly comprising a plurality of digit line plug contact pads and capacitor storage cell contact pads which contact a semiconductor wafer. A dielectric layer is provided over the wafer substrate assembly and etched to expose the digit line plug contact pads, and a liner is provided in the opening. A portion of the digit line plug is formed, then the dielectric layer is etched again to expose the capacitor storage cell contact pads. A capacitor bottom plate is formed to contact the storage cell contact pads, then the dielectric layer is etched a third time using the liner and the bottom plate as an etch stop layer. A capacitor cell dielectric layer and capacitor top plate are formed which provide a double-sided container cell. An additional dielectric layer is formed, then the additional dielectric layer, cell top plate, and the cell dielectric are etched to expose the digit line plug portion. Finally, a second digit line plug portion is formed to contact the first plug portion. A novel structure resulting from the inventive method is also discussed.
Public/Granted literature
- US20040164335A1 Double sided container process used during the manufacture of a semiconductor device Public/Granted day:2004-08-26
Information query
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