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US07082249B2 Low optical overlap mode (LOOM) waveguiding system and method of making same 失效
低光重叠模式(LOOM)波导系统及其制作方法

Low optical overlap mode (LOOM) waveguiding system and method of making same
Abstract:
An optical system including: a substrate having a recess; and, a substantially planar, semiconductor waveguiding membrane suspended over the recess and having a thickness less than about 200 nm; wherein, the optical system supports a propagating optical mode having a majority of its energy external to the semiconductor waveguiding membrane.
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