Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
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Application No.: US11094158Application Date: 2005-03-31
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Publication No.: US07069789B2Publication Date: 2006-07-04
- Inventor: Hiroshi Tokunaga , Kenji Nagata , Masaaki Ono , Toshio Hanazawa , Hiroshi Ishikawa
- Applicant: Hiroshi Tokunaga , Kenji Nagata , Masaaki Ono , Toshio Hanazawa , Hiroshi Ishikawa
- Applicant Address: JP Yokohama JP Kawasaki
- Assignee: Fujitsu Media Devices Limited,Fujitsu Limited
- Current Assignee: Fujitsu Media Devices Limited,Fujitsu Limited
- Current Assignee Address: JP Yokohama JP Kawasaki
- Agency: Arent Fox PLLC
- Priority: JP2004-205179 20040712
- Main IPC: G01B7/16
- IPC: G01B7/16

Abstract:
An inertial sensor such as an acceleration sensor or gyro can have superior impact resistance by regulating displacement of a weight portion in the direction of an upper limit. The sensor includes a sensor portion that has a fixing part, a weight portion the height of which is a predetermined size shorter than that of the fixing part, and a beam portion that links the weight portion and the fixing part; a plate-like first stopper portion that covers the weight portion and is bonded to the fixing part with clearance of a predetermined size from the weight portion; and a flat, plate-like second stopper portion that is connected to the fixing part via a bump of a predetermined height on the side opposite the first stopper portion.
Public/Granted literature
- US20060005629A1 Inertial sensor Public/Granted day:2006-01-12
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